Research

Dither Stage With Lateral Bimorphs

Dither Stage With Lateral Bimorphs

Our research focuses on the following areas:

  • CMOS-MEMS SONAR
  • Transient Micro-Integrated Remote Sensors
  • Self-Calibrating Inertial Sensors
  • Ultrasonic Neural Probes
  • Chip Scale Gas Sensors
  • Photo-acoustics
  • Radioisotope-powered Lithography and Power Generation
  • Chip Scale Particle Accelerators
  • Tip Based Nanofabrication

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