CMOS Integrated GHz Ultrasonics
Silicon Multimodal Imaging Tweezer
The Pew Sundial on the Engineering Quad.
SonicMEMS Laboratory works on very diverse topics aimed at transforming the way world can be viewed. Topics such as (1) linear and nonlinear effects of ultrasound for microfluidics, (2) applications of radioactive thin films for power and lithography, (3) microprobes for surgery and bioinstrumentation, (4) nanoelectromechanical effects, (5) hybrid insect microsystems, (6) micromechanical solar energy, (7) chip scale particle accelerators, (8) self-calibrating inertial sensors (9) and gas sensing devices are among the current foci of the group.